SYSTEM | ISG1500 |
---|---|
Productivity (TIE mm/boule) | 7,500 |
Dimensions (W X L X H, mm) | 3,500 X 2,200 X 3,300 |
Weight (kg) | 4,850 |
Cycle Time (day) | 20 |
Main Supply Power | 380VAC(±3%),50(60)㎐, 3Phase (5Wire) |
Max. Power Supply Capacity(㎾) | 90 |
Coolant Consumption (㎥/h) | 8.0 |
Coolant Pressure (㎫) | 0.3 |
Ambient gas (LPM) | 30 |
Coolant Temperature (℃) | 22~30 |
Chamber Pressure | Vacuum : 4.2x10-2 (torr) |
Atmosphere : 780(mmHg) |